Electrochemical micromachining: An introduction

Distance effects in electrochemical micromachining

Considering exponential dependence of currents on double-layer voltage and the feedback effect of the electrolyte resistance, a distance effect in electrochemical micromachining is found, namely that both time constant and double-layer voltage depend on the separation of electrodes. The double-layer voltage is the real voltage used in processing. Under DC voltage, the apparent voltages between ...

Electrochemical Micromachining as an Enabling Technology for Advanced Silicon Microstructuring

Based on previous theoretical and experimental results on the electrochemical etching of silicon in HF-based aqueous electrolytes, it is shown for the first time that silicon microstructures of various shapes and silicon microsystems of high complexity can be effectively fabricated in any research lab with sub-micrometer accuracy and high aspect ratio values (about 100). This is well beyond any...

The Mathematical Modeling and Computer Simulation of Pulse Electrochemical Micromachining

need for complex and accurate three dimensional (3-D) microcomponents is increasing rapidly for many industrial and consumer products. Electrochemical machining process (ECM) has the potential of generating desired crack-free and stress-free surfaces of microcomponents. This paper reports a study of pulse electrochemical micromachining (PECMM) using ultrashort (nanoseconds) pulses for generatin...

Introduction to Electrochemical Cells

The purpose of this chapter is to provide the basic knowledge on batteries, which will allow for their general understanding. Therefore, after defi ning their components and structure, an overview of the quantities that characterize these storage devices will be given. Scientifi cally batteries are referred to as electrochemical or galvanic cells, due to the fact that they store electrical ener...

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